Vacuum pump classification From high / ultra vacuum to rough / low vacuum, the product can be divided into 14 categories: high / ultra vacuum pump - cryogenic pump, molecular pump, sputtering ion pump, titanium sublimation pump, diffusion pump. In the vacuum pump - dry pump, double-stage rotary vane pump, Roots pump, oil booster pump, steam jet pump. Rough / low vacuum pump - single-stage rotary vane pump, slide valve pump, liquid ring pump, reciprocating vacuum pump. Market Trends of Various Vacuum Pump Products 1. Liquid Ring Pump Although the liquid ring pump is a rough vacuum pump, it still has a large market in China's petroleum, chemical, electric power, light textile, papermaking and medicine industries. Abroad, liquid ring pump sales account for 14% of the total vacuum pump market, second only to the dry pump, so Nash, Seimems and Kinney and other companies are investing in China to build factories or establish sales networks, and continuously expand its market share in China. As the liquid ring pump is mostly castings, processing requirements are not high, is labor-intensive products, so the domestic liquid ring pump competitive price, the key is to improve the design, reduce size, reduce weight, improve efficiency and reduce energy Consumption 2. Sliding Valve Pump Because of the more durable pump valve, reliable, a variety of vacuum furnaces at home and abroad, coating machine and drying, dipping and other equipment are used as a pump before the pump, but the pump valve slide weight, processing workload Larger, so the foreign vacuum plants are looking for partners in China. In order to make domestic slide valve pump to enter the international market, we must further reduce the vibration and noise of the pump to eliminate fuel injection and oil spills, improve the reliability of long-term operation of the slide valve pump. 3. Direct-coupled rotary vane pump As vacuum technology continues to expand in various fields of application, the demand for direct-coupled rotary vane pumps is increasing. Due to the large number of pumps, large processing and assembly workload, the price is very low, so some foreign vacuum manufacturers in China to establish a professional factory. Domestic small and medium-sized direct-coupled rotary vane pump technology has been passed, the price is far cheaper than the foreign vacuum pump, so domestic pump still has a competitive advantage, the key is to solve the shaft seal oil leakage and vacuum pump oil performance and quality issues , To ensure that the direct pump in the high-speed, high temperature performance and reliable operation, but also to further improve the domestic direct rotary vane pump the ability to extract water vapor. Roots pump Roots pump production from abroad point of view, several major foreign companies, such as Leybold, Balzers, Alcatell, Edwards and ULVAC, their Roots pump sales worldwide Roots pump sales ratio No more than 5%, which totaled only 20% of the 5, Roots pump production is not large, but the price of foreign roots pump is much higher than the domestic pump. At present, almost all domestic and foreign large or small high-vacuum and medium-vacuum systems, in order to shorten the extraction time, increase production efficiency are equipped with Roots pump, so the domestic roots pump must occupy the domestic market based on trying to enter the international market , So you must further reduce the vibration noise of the domestic roots pump to completely solve the shaft seal leakage problems, improve the appearance of the pump quality, improve pump finish and cleanliness. In addition, taking into account the power frequency of some countries and regions 60Hz, but also to ensure Roots pump speed increase in the case of long-term reliability. At present, the domestic air-cooled straight-row atmospheric roots pump progress quickly, technically mature. Since this pump is equipped with a gas cooler below the exhaust port, a portion of the cooled gas is returned to the pump chamber through the pipe to cool the rotor, resulting in a balanced heat of compression so that the pump can be vented to the atmosphere. In order to meet the requirements of different ultimate vacuum, this pump can be used in series, generally plus an air-cooled front-row atmospheric Roots pump, the ultimate vacuum to be higher than the previous stage pump an order of magnitude. This pump because there is no working medium in the pump chamber, in fact, is also a dry pump. At present, this air-cooled, straight-draft atmospheric roots pumps and units have been tested for long-term operation on petroleum, chemical, plastics, pesticide, turbine rotor balancing, aerospace modeling and other devices and should therefore be vigorously promoted domestically And application. 5. Molecular pump Molecular pump in the field of foreign semiconductor technology is used to replace many cryogenic pumps, especially sputtering, etching and LCVD devices are complex color composite pump and traction pump as the main pump. As the molecular pump on the steam pumping speed is only one-fourth of the same caliber vacuum pump pumping speed, so the molecular pump exhaust time longer than the cryogenic pump. In order to improve the pumping speed, a cryogenic cold plate at -130 ℃ ~ -150 ℃ is imported on the inlet side of the molecular pump abroad, which is called low temperature molecular pump. The water vapor is captured by the cryogenic plate, while the other gas is pumped by the molecular pump. This low temperature molecular pump in the vacuum coating device application, both to improve production efficiency and improve the quality of the film. As China's semiconductor industry, film industry and the rapid development of scientific research, molecular pump should be the focus of the development of China's vacuum pump manufacturing industry. First, the molecular pump to establish a complete series from small to large, and research and development of various composite molecular pumps, traction pumps and cryogenic molecular pumps to meet the needs of different occasions. 6. Dry pump Foreign dry pump market continues to grow, the main driver from the semiconductor industry, chemical industry, film industry's rapid development. In Japan, the semiconductor industry has replaced the oil-sealed mechanical pump with a dry vacuum pump. More than 45% of the semiconductor industry in Europe and the United States replaced the oil-sealed mechanical pump with a dry vacuum pump, greatly improving the performance and quality of the product. In order to meet the requirements of different application fields and different working conditions, multistage Roots vacuum pumps abroad, multi-stage claw vacuum pumps, screw vacuum pumps, scroll vacuum pumps, reciprocating piston vacuum pumps and turbine oil-free vacuum pumps. The ultimate pressure from 10Pa ~ 10-2Pa, pumping speed from 20m3 / h ~ 500m3 / h. According to statistics, at present, the application of domestic dry pump is less than 1%. All the dry pumps used in the domestic semiconductor industry are imported from abroad and the price is very expensive. Therefore, our country should make great efforts to research and develop dry pumps so that dry pumps will become the new economic growth point of China's vacuum industry. There are other types of vacuum pump classification. 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